Scanning electron microscopes (SEMs) use detectors to detect and measure the electrons that are emitted from the sample. There are several types of detectors that are used in SEMs, including:
Secondary Electron Detectors (SEDs): These detectors measure the electrons that are emitted from the sample surface as a result of the primary electron beam hitting the sample. SEDs are commonly used for imaging and for obtaining information about the surface topography and elemental composition of the sample.
Backscattered Electron Detectors (BSEDs): These detectors measure the electrons that are scattered back towards the sample surface after being struck by the primary electron beam. BSEDs are used for imaging and for obtaining information about the sample’s composition and density.
X-Ray Detectors: These detectors measure the X-rays that are emitted from the sample as a result of the primary electron beam hitting the sample. X-Ray detectors are used for obtaining information about the sample’s elemental composition.
Energy Dispersive Spectroscopy (EDS) Detectors: These detectors measure the energy of the electrons that are emitted from the sample. EDS detectors are used for obtaining information about the sample’s elemental composition.
Cathodoluminescence Detectors: These detectors measure the light that is emitted from the sample as a result of the primary electron beam hitting the sample. Cathodoluminescence detectors are used for obtaining information about the sample’s optical properties.
Each type of detector has its own unique capabilities and limitations, and the choice of detector depends on the specific imaging and analysis needs of the experiment.
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